Gentle Micro/Nano-Engineering for Fragile Material Microsystems
易碎材料微系统的轻柔微纳加工技术
Juergen Brugger
ABSRACT
Polymer-based micro- and nano-systems (MEMS/NEMS) have a great potential for stretchable electronics and biomedical applications and substantial progress is made in process and integration technologies. We must admit though that up to now the techniques to engineer fragile functional polymers into reliable 3D microsystems for daily use are far way from the perfection we appreciate from integrated silicon microelectronics with its scalable wafer-scale manufacturing. One reason for that is that due to the wide choice of materials involved and the variety of required shapes in soft-material systems a standard fabrication platform with the appropriate tools and processes is not yet available.
This talk will provide an overview of recent achievements in advanced micro and nano-manufacturing and associated key techniques than can be applied also to fragile materials, where harsh process steps using charged beams and etch chemistry may be harmful. I will in particular present nanostenciling, capillary assembly and local thermal processing. Together they form part of the gentle toolbox for future micro/nano-manufacturing applicable for the engineering of soft, flexible, wearable and implantable microdevices.
基于聚合物的微纳米系统（MEMS / NEMS）在可拉伸的电子和生物医学应用中具有巨大的潜力，并且在工艺和集成技术方面也取得了长足的进步。但我们必须承认，到目前为止将易碎的功能聚合物转化为我们日常技术能用的可靠3D微系统，与集成硅微电子技术及其可扩展的晶圆级制造所获得的完美性能相比，还相差甚远。其原因在于柔性材料系统中所涉及的材料范围广泛且需求的形状多样性，因此具有合适工具和工艺的标准制造平台仍未实现。本次讲座会首先概述先进微纳制造技术的最新研究进展，其中的某些关键技术同样可以用于处理易碎材料，但使用带电离子束或电子束以及化学腐蚀的苛刻工艺步骤可能是有害的。Juergen Brugger教授将特别介绍纳米模板光刻，毛细组装和局部热处理三种技术，它们共同构成了轻柔温和的“工具箱”，能够适用于柔软可穿戴、可植入微器件的下一代微纳米制造手段。高分辨率镂空模板光刻使我们能够研究高度局部化的材料沉积，而无需进行苛刻的光刻步骤，例如高能束曝光、蚀刻或显影。 实例包括用于生物传感器的刚性和柔性聚酰亚胺，聚对二甲苯，SU-8和PDMS衬底上的金属纳米结构（<50 nm）。 最近，通过PVD中模板减少的通量允许控制分子的表面结晶，从而改善有机电子器件。毛细组装是一种特别温和的（水基）方法，用于将预先制造的胶体溶液中的纳米材料组装到特定位置，具有高通量的特点，且可以实现单一位置、方向和粒子间间隙的纳米级可控。另一个例子是具有亚微米分辨率的功能材料的局部热处理，这是一种新兴技术，使用纳米热扫描探针将设计图形写入基底，超分子聚合物，丝绸2D材料等。 本次讲座将展示每种技术的优点和局限性，并提供一些说明阐述如何将它们与常规方法混合搭配使用，从而成为聚合物MEMS能源器件和生物可降解药物释放微胶囊等，软材料微纳机电系统新一代制造平台的一个重要组成部分。
BIOGRAPHY
Juergen Brugger is Professor of Microengineering and co-affiliated to Materials Science. Before joining EPFL he was at the MESA Research Institute of Nanotechnology at the University of Twente in the Netherlands, at the IBM Zurich Research Laboratory, and at the Hitachi Central Research Laboratory, in Tokyo, Japan. He received his Master in Physical-Electronics and his PhD degree from Neuchatel University, Switzerland. Research in Juergen Brugger’s laboratory focuses on various aspects of MEMS and Nanotechnology. The group has made several important contributions to the field, at the fundamental level as well as in technological development, as demonstrated by the start-ups that spun off from the lab. In his research, key competences are in micro/nanofabrication, additive micro-manufacturing, new materials for MEMS, increasingly for biomedical applications. He published over 200 peer-refereed papers and supervised 20 PhD students. Former students and postdocs have been successful in receiving awards and starting their own scientific careers (6 professors so far). Juergen Brugger has been appointed in 2016 Fellow of the IEEE “For contributions to micro and nano manufacturing technology”. In 2017 he was awarded an ERC AdvG in the field of advanced micro-manufacturing.
Juergen Brugger教授是微工程学及材料科学教授。在加入瑞士洛桑联邦理工大学（EPFL）之前，他曾在荷兰屯特大学MESA纳米技术研究所，IBM苏黎世研究实验室以及日本东京的日立中央研究实验室工作。他在瑞士纳沙泰尔大学获得了物理电子学硕士学位和博士学位，Juergen Brugger教授实验室的研究集中在MEMS和纳米技术的各个方面。从实验室中诞生的初创公司可以看出，Juergen Brugger教授小组在基础研究领域以及技术开发方面都做出了重要贡献。其研究工作的核心重点在于微纳米加工，增材微制造，MEMS新材料，特别是快速增长的面向生物医学领域的应用。他发表了200多篇同行评议论文，指导了20名博士生顺利毕业。已毕业学生和出站博士后获得多项荣誉奖励，并开始了他们自己的学术事业（到目前为止有6位教授）。Juergen Brugger教授在2016年因“对微纳米制造技术有贡献”被任命为IEEE FELLOW（IEEE 会士）， 并在2017年被授予先进微制造领域的ERC AdvG荣誉。